Issued Patents All Time
Showing 1–25 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161965 | Method of test probe alignment control | Jui-Long Chen, Chien-Chih Liao, Chin-Hsiang Lin, Hui-Yun Chao, Tseng Chin Lo +1 more | 2018-12-25 |
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2018-10-30 |
| 10096482 | Apparatus and method for chemical mechanical polishing process control | Keung Hui, Jin-Ning Sung, Soon-Kang Huang, Yen-Di Tsen | 2018-10-09 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2018-08-14 |
| 9997420 | Method and/or system for chemical mechanical planarization (CMP) | Yen-Di Tsen, Cheng Yen-Wei | 2018-06-12 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jo Fei Wang | 2018-01-16 |
| 9727049 | Qualitative fault detection and classification system for tool condition monitoring and associated methods | Chia-Tong Ho, Po-Feng Tsai, Jung-Chang Chen, Tze-Liang Lee, Jo Fei Wang +1 more | 2017-08-08 |
| 9698065 | Real-time calibration for wafer processing chamber lamp modules | Chih-Tien Chang, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2017-07-04 |
| 9519285 | Systems and associated methods for tuning processing tools | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2016-12-13 |
| 9477219 | Dynamic compensation in advanced process control | Chih-Wei Hsu, Jin-Ning Sung, Shin-Rung Lu | 2016-10-25 |
| 9466101 | Detection of defects on wafer during semiconductor fabrication | Chun-Hsien Lin, Liu Bo-Tsun, Chin-Ti Ko, Wu Cheng-Hung, Kuo-Hung Chao +3 more | 2016-10-11 |
| 9442392 | Scanner overlay correction system and method | Yen-Di Tsen, Yi-Ping Hsieh, Chen-Yen Huang, Shin-Rung Lu | 2016-09-13 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2016-05-24 |
| 9323244 | Semiconductor fabrication component retuning | Keung Hui, Cheng Yen-Wei | 2016-04-26 |
| 9250619 | Systems and methods of automatic boundary control for semiconductor processes | Chih-Wei Hsu, Mei-Jen Wu, Yen-Di Tsen, Jo Fei Wang, Chin-Hsiang Lin | 2016-02-02 |
| 9165843 | Systems and methods of automatically detecting failure patterns for semiconductor wafer fabrication processes | Jui-Long Chen, Hui-Yun Chao, Yen-Di Tsen | 2015-10-20 |
| 9158301 | Semiconductor processing dispatch control | Sunny Wu, Yen-Di Tsen, Chun-Hsien Lin, Keung Hui, Jo Fei Wang | 2015-10-13 |
| 9158867 | 2D/3D analysis for abnormal tools and stages diagnosis | Chun-Hsien Lin, Jui-Long Chen, Hui-Yun Chao, Chin-Hsiang Lin | 2015-10-13 |
| 9159597 | Real-time calibration for wafer processing chamber lamp modules | Chih-Tien Chang, Sunny Wu, Jo Fei Wang, Chin-Hsiang Lin | 2015-10-13 |
| 9141097 | Adaptive and automatic determination of system parameters | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jo Fei Wang | 2015-09-22 |
| 9123583 | Overlay abnormality gating by Z data | Chun-Hsien Lin, Kuo-Hung Chao, Yi-Ping Hsieh, Yen-Di Tsen, Jui-Chun Peng +1 more | 2015-09-01 |
| 9102033 | Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process | Keung Hui, Jin-Ning Sung, Huang Soon Kang, Yen-Di Tsen | 2015-08-11 |
| 9082661 | Scanner overlay correction system and method | Yen-Di Tsen, Shin-Rung Lu | 2015-07-14 |
| 9026239 | APC model extension using existing APC models | Po-Feng Tsai, Yen-Di Tsen, Jo Fei Wang | 2015-05-05 |
| 9023664 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2015-05-05 |