Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2018-10-30 |
| 9105591 | Rotatable and tunable heaters for semiconductor furnace | Hsin-Hsien Wu, Chun-Lin Chang | 2015-08-11 |
| 9023664 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2015-05-05 |
| 8834671 | Apparatus and method for controlling silicon nitride etching tank | Tsung-Min Huang, Ming-Tsao Chiang, Cheng-Chen Calvin Hsueh | 2014-09-16 |
| 8536491 | Rotatable and tunable heaters for semiconductor furnace | Hsin-Hsien Wu, Chun-Lin Chang | 2013-09-17 |
| 8409997 | Apparatus and method for controlling silicon nitride etching tank | Tsung-Min Huang, Ming-Tsao Chiang, Cheng-Chen Calvin Hsueh | 2013-04-02 |
| 8404572 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Chi-Ming Yang, Chyi Shyuan Chern, Jun-Lin Yeh +4 more | 2013-03-26 |
| 8277286 | Slurry dispenser for chemical mechanical polishing (CMP) apparatus and method | Kun-Ku Hung, Huang Soon Kang, Chyi Shyuan Chern | 2012-10-02 |
| 7732344 | High selectivity etching process for metal gate N/P patterning | Fang Wen Tsai, Matt Yeh, Ming Wang, Shun Wu Lin, Chi-Chun Chen +1 more | 2010-06-08 |