TH

Tsung-Min Huang

TSMC: 42 patents #805 of 12,232Top 7%
Overall (All Time): #73,321 of 4,157,543Top 2%
42
Patents All Time

Issued Patents All Time

Showing 1–25 of 42 patents

Patent #TitleCo-InventorsDate
10916443 Spacer-damage-free etching Chung-Ju Lee, Yung-Hsu Wu 2021-02-09
10283371 Spacer-damage-free etching Chung-Ju Lee, Yung-Hsu Wu 2019-05-07
10186455 Interconnect structure and methods of making same Chung-Ju Lee, Tsung-Jung Tsai 2019-01-22
10049878 Self-aligned patterning process Chung-Ju Lee 2018-08-14
9947535 Trench formation using horn shaped spacer Chung-Ju Lee, Yung-Hsu Wu 2018-04-17
9911646 Self-aligned double spacer patterning process Cheng-Hsiung Tsai, Yung-Hsu Wu, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue 2018-03-06
9831117 Self-aligned double spacer patterning process Yung-Hsu Wu, Cheng-Hsiung Tsai, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue 2017-11-28
9818695 Material and process for copper barrier layer Chung-Ju Lee 2017-11-14
9806026 Self repairing process for porous dielectric materials Chung-Ju Lee, Tien-I Bao 2017-10-31
9768031 Semiconductor device manufacturing methods Chung-Ju Lee, Cheng-Hsiung Tsai 2017-09-19
9735048 Semiconductor device and fabricating process for the same Chien-Hua Huang, Chung-Ju Lee 2017-08-15
9728408 Method of semiconductor integrated circuit fabrication Chung-Ju Lee, Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen 2017-08-08
9679803 Method for forming different patterns in a semiconductor structure using a single mask Chung-Ju Lee, Chih-Tsung Shih, Yen-Cheng Lu 2017-06-13
9646932 Method for forming interconnect structure that avoids via recess Chao-Hsien Peng, Hsiang-Huan Lee, Shau-Lin Shue 2017-05-09
9607850 Self-aligned double spacer patterning process Cheng-Hsiung Tsai, Yung-Hsu Wu, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue 2017-03-28
9601346 Spacer-damage-free etching Chung-Ju Lee, Yung-Hsu Wu 2017-03-21
9576893 Semiconductor structure and semiconductor fabricating process for the same Chung-Ju Lee 2017-02-21
9576851 Interconnect structure and methods of making same Chung-Ju Lee, Tsung-Jung Tsai 2017-02-21
9558927 Wet cleaning method for cleaning small pitch features Chien-Hua Huang, Chung-Ju Lee 2017-01-31
9514979 Trench formation using horn shaped spacer Chung-Ju Lee, Yung-Hsu Wu 2016-12-06
9502249 Masking process and structures formed thereby Chung-Ju Lee 2016-11-22
9449839 Self-assembled monolayer for pattern formation Chung-Ju Lee, Chien-Hua Huang 2016-09-20
9418862 Method for integrated circuit patterning Chieh-Han Wu, Chung-Ju Lee, Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu 2016-08-16
9406614 Material and process for copper barrier layer Chung-Ju Lee 2016-08-02
9368348 Self-aligned patterning process Chung-Ju Lee 2016-06-14