Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8871032 | Wet processing apparatuses | Kuang-Nian Tang, Yang-Kai Fan, Yu-Sheng Su, Yu-Cheng Shih | 2014-10-28 |
| 8834671 | Apparatus and method for controlling silicon nitride etching tank | Zin-Chang Wei, Tsung-Min Huang, Cheng-Chen Calvin Hsueh | 2014-09-16 |
| 8616821 | Integrated apparatus to assure wafer quality and manufacturability | Shao-Yen Ku, Chi-Ming Yang, Yu-Fen Tzeng, Chin-Hsiang Lin | 2013-12-31 |
| 8460478 | Wet processing apparatuses | Kuang-Nian Tang, Yang-Kai Fan, Yu-Sheng Su, Yu-Cheng Shih | 2013-06-11 |
| 8409997 | Apparatus and method for controlling silicon nitride etching tank | Zin-Chang Wei, Tsung-Min Huang, Cheng-Chen Calvin Hsueh | 2013-04-02 |