Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8871032 | Wet processing apparatuses | Kuang-Nian Tang, Yu-Sheng Su, Ming-Tsao Chiang, Yu-Cheng Shih | 2014-10-28 |
| 8460478 | Wet processing apparatuses | Kuang-Nian Tang, Yu-Sheng Su, Ming-Tsao Chiang, Yu-Cheng Shih | 2013-06-11 |
| 7405165 | Dual-tank etch method for oxide thickness control | Yong Rong Chang, Yi Song Chiu, Ping Yin Shin | 2008-07-29 |