SL

Shun Wu Lin

TSMC: 22 patents #1,516 of 12,232Top 15%
Overall (All Time): #189,772 of 4,157,543Top 5%
22
Patents All Time

Issued Patents All Time

Showing 1–22 of 22 patents

Patent #TitleCo-InventorsDate
12381092 Etchant for etching a cobalt-containing member in a semiconductor structure and method of etching a cobalt-containing member in a semiconductor structure Ren-Kai Chen, Li-Chen Lee, Ming-Hsi Yeh, Kuo-Bin Huang 2025-08-05
12362189 Semiconductor devices and methods of manufacturing thereof Chia-Ling Chung, Chun-Chih Cheng, Ming-Hsi Yeh, Kuo-Bin Huang 2025-07-15
12317551 Semiconductor devices including backside power rails and methods of manufacture Chun-Hung Wu, Chia-Ling Chung, Su-Hao Liu, Liang-Yin Chen, Huicheng Chang +1 more 2025-05-27
11854816 Semiconductor devices and methods of manufacturing thereof Chia-Ling Chung, Chun-Chih Cheng, Ming-Hsi Yeh, Kuo-Bin Huang 2023-12-26
11735426 Semiconductor device and method of manufacture Jian-Jou Lian, Li-Min Chen, Neng-Jye Yang, Ming-Hsi Yeh, Kuo-Bin Huang 2023-08-22
11476124 Etchant for etching a cobalt-containing member in a semiconductor structure and method of etching a cobalt-containing member in a semiconductor structure Ren-Kai Chen, Li-Chen Lee, Ming-Hsi Yeh, Kuo-Bin Huang 2022-10-18
11101135 Semiconductor device and method of manufacture Jian-Jou Lian, Li-Min Chen, Neng-Jye Yang, Ming-Hsi Yeh, Kuo-Bin Huang 2021-08-24
10676668 Wet etch chemistry for selective silicon etch Neng-Jye Yang, Kuo-Bin Huang, Ming-Hsi Yeh, Yu-Wen Wang, Jian-Jou Lian +1 more 2020-06-09
10529572 Semiconductor device and method of manufacture Jian-Jou Lian, Li-Min Chen, Neng-Jye Yang, Ming-Hsi Yeh, Kuo-Bin Huang 2020-01-07
10179878 Wet etch chemistry for selective silicon etch Neng-Jye Yang, Kuo-Bin Huang, Ming-Hsi Yeh, Yu-Wen Wang, Jian-Jou Lian +1 more 2019-01-15
9362124 Method of patterning a metal gate of semiconductor device Chien-Hao Chen, Chi-Chun Chen, Ryan Chia-Jen Chen, Yi-Hsing Chen, Matt Yeh +2 more 2016-06-07
8993452 Method of patterning a metal gate of semiconductor device Matt Yeh, Chi-Chun Chen, Ryan Chia-Jen Chen, Yi-Hsing Chen, Chien-Hao Chen +2 more 2015-03-31
8415254 Method for removing dummy poly in a gate last process Matt Yeh, Fan-Yi Hsu, Shu-Yuan Ku, Hui Ouyang 2013-04-09
8357617 Method of patterning a metal gate of semiconductor device Matt Yeh, Chi-Chun Chen, Ryan Chia-Jen Chen, Yi-Hsing Chen, Chien-Hao Chen +2 more 2013-01-22
8268085 Methods for forming metal gate transistors Matt Yeh, Hui Ouyang 2012-09-18
8173504 Method of fabricating gate electrode using a treated hard mask Matt Yeh, Fan-Yi Hsu, Hui Ouyang, Chi-Ming Yang 2012-05-08
8114721 Method of controlling gate thickness in forming FinFET devices Peng-Soon Lim, Matt Yeh, Ouyang Hui 2012-02-14
8048810 Method for metal gate N/P patterning Fang Wen Tsai, Jim Huang, Li-Shiun Chen, Kuang-Yuan Hsu 2011-11-01
7915105 Method for patterning a metal gate Matt Yeh, Chung-Ming Wang, Chi-Chun Chen 2011-03-29
7732344 High selectivity etching process for metal gate N/P patterning Fang Wen Tsai, Matt Yeh, Ming Wang, Chi-Chun Chen, Zin-Chang Wei +1 more 2010-06-08
7727900 Surface preparation for gate oxide formation that avoids chemical oxide formation Matt Yeh, Chi-Chun Chen, Shih-Chang Chen 2010-06-01
7129184 Method of depositing an epitaxial layer of SiGe subsequent to a plasma etch Chih-Chien Chang, Pang-Yen Tsai, Tze-Liang Lee, Shih-Chang Chen 2006-10-31