Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113233 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2018-10-30 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2018-08-14 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jong-I Mou | 2018-01-16 |
| 9727049 | Qualitative fault detection and classification system for tool condition monitoring and associated methods | Chia-Tong Ho, Po-Feng Tsai, Jung-Chang Chen, Tze-Liang Lee, Jong-I Mou +1 more | 2017-08-08 |
| 9698065 | Real-time calibration for wafer processing chamber lamp modules | Chih-Tien Chang, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2017-07-04 |
| 9519285 | Systems and associated methods for tuning processing tools | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2016-12-13 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2016-05-24 |
| 9250619 | Systems and methods of automatic boundary control for semiconductor processes | Chih-Wei Hsu, Mei-Jen Wu, Yen-Di Tsen, Jong-I Mou, Chin-Hsiang Lin | 2016-02-02 |
| 9159597 | Real-time calibration for wafer processing chamber lamp modules | Chih-Tien Chang, Sunny Wu, Jong-I Mou, Chin-Hsiang Lin | 2015-10-13 |
| 9158301 | Semiconductor processing dispatch control | Sunny Wu, Yen-Di Tsen, Chun-Hsien Lin, Keung Hui, Jong-I Mou | 2015-10-13 |
| 9141097 | Adaptive and automatic determination of system parameters | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou | 2015-09-22 |
| 9026239 | APC model extension using existing APC models | Po-Feng Tsai, Yen-Di Tsen, Jong-I Mou | 2015-05-05 |
| 9023664 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2015-05-05 |
| 8781614 | Semiconductor processing dispatch control | Sunny Wu, Yen-Di Tsen, Chun-Hsien Lin, Keung Hui, Jong-I Mou | 2014-07-15 |
| 8685759 | E-chuck with automated clamped force adjustment and calibration | Sunny Wu, Jong-I Mou | 2014-04-01 |
| 8606387 | Adaptive and automatic determination of system parameters | Po-Feng Tsai, Chia-Tong Ho, Sunny Wu, Jong-I Mou | 2013-12-10 |
| 8549012 | Processing exception handling | Po-Feng Tsai, Jin-Ning Sung, Yen-Di Tsen, Jong-I Mou | 2013-10-01 |
| 8452439 | Device performance parmeter tuning method and system | Sunny Wu, Chun-Hsien Lin, Kun-Ming Chen, Dung-Yian Hsieh, Hui-Ru Lin +2 more | 2013-05-28 |
| 8404572 | Multi-zone temperature control for semiconductor wafer | Chun-Lin Chang, Hsin-Hsien Wu, Zin-Chang Wei, Chi-Ming Yang, Chyi Shyuan Chern +4 more | 2013-03-26 |
| 8396583 | Method and system for implementing virtual metrology in semiconductor fabrication | Po-Feng Tsai, Andy Tsen, Jong-I Mou | 2013-03-12 |
| 8295965 | Semiconductor processing dispatch control | Sunny Wu, Yen-Di Tsen, Chun-Hsien Lin, Keung Hui, Jong-I Mou | 2012-10-23 |
| 8239056 | Advanced process control for new tapeout product | Chih-Wei Hsu, Yu-Jen Cheng, Wen-Pin Liu, Shun-Ping Wang, Shin-Rung Lu +3 more | 2012-08-07 |
| 8205173 | Physical failure analysis guiding methods | Sunny Wu, Yen-Di Tsen, Monghsung Chuang, Fu-Min Huang, Jong-I Mou | 2012-06-19 |
| 8108060 | System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture | Andy Tsen, Po-Feng Tsai, Ming-Yu Fan, Jill Wang, Jong-I Mou +1 more | 2012-01-31 |
| 8041451 | Method for bin-based control | Sunny Wu, Chih-Sheng Shih, Andy Tsen, Jong-I Mou, Hsin Kuan | 2011-10-18 |