Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Po-Feng Tsai, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2018-08-14 |
| 9870896 | System and method for controlling ion implanter | Po-Feng Tsai, Chia-Hsing Liao, Sheng-Wei Lee, Jo Fei Wang, Jong-I Mou | 2018-01-16 |
| 9727049 | Qualitative fault detection and classification system for tool condition monitoring and associated methods | Po-Feng Tsai, Jung-Chang Chen, Tze-Liang Lee, Jo Fei Wang, Jong-I Mou +1 more | 2017-08-08 |
| 9519285 | Systems and associated methods for tuning processing tools | Po-Feng Tsai, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2016-12-13 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Po-Feng Tsai, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2016-05-24 |
| 9141097 | Adaptive and automatic determination of system parameters | Po-Feng Tsai, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2015-09-22 |
| 8942840 | Auto device skew manufacturing | Jui-Long Chen, Hui-Yun Chao | 2015-01-27 |
| 8606387 | Adaptive and automatic determination of system parameters | Po-Feng Tsai, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2013-12-10 |
| 8406912 | System and method for data mining and feature tracking for fab-wide prediction and control | Jui-Long Chen, Po-Feng Tsai, Hui-Yun Chao, Jong-I Mou | 2013-03-26 |
| 8391999 | Auto device skew manufacturing | Jui-Long Chen, Hui-Yun Chao | 2013-03-05 |
| 7101758 | Poly-etching method for split gate flash memory cell | Hsiang-Fan Lee, Shih-Wei Wang, Yi-Jiun Lin, Kuo-Wei Chu, Ching-Sen Kuo | 2006-09-05 |