Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051593 | Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target | Chun-Jung Huang, Li-Hsin Chu, Henry Peng, Kuang-Huan Hsu, Tsung Wei Chen +1 more | 2024-07-30 |
| 12050153 | Method for monitoring transport vehicle and maintenance thereof | Chun-Jung Huang, Kuang-Huan Hsu, Jen-Ti Wang, An-Sheng Chung | 2024-07-30 |
| 11615961 | Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target | Chun-Jung Huang, Li-Hsin Chu, Henry Peng, Kuang-Huan Hsu, Tsung Wei Chen +1 more | 2023-03-28 |
| 11195720 | Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target | Chun-Jung Huang, Li-Hsin Chu, Henry Peng, Kuang-Huan Hsu, Tsung Wei Chen +1 more | 2021-12-07 |
| 10047439 | Method and system for tool condition monitoring based on a simulated inline measurement | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2018-08-14 |
| 9870896 | System and method for controlling ion implanter | Chia-Tong Ho, Chia-Hsing Liao, Sheng-Wei Lee, Jo Fei Wang, Jong-I Mou | 2018-01-16 |
| 9727049 | Qualitative fault detection and classification system for tool condition monitoring and associated methods | Chia-Tong Ho, Jung-Chang Chen, Tze-Liang Lee, Jo Fei Wang, Jong-I Mou +1 more | 2017-08-08 |
| 9519285 | Systems and associated methods for tuning processing tools | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2016-12-13 |
| 9349660 | Integrated circuit manufacturing tool condition monitoring system and method | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou, Chin-Hsiang Lin | 2016-05-24 |
| 9141097 | Adaptive and automatic determination of system parameters | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2015-09-22 |
| 9026239 | APC model extension using existing APC models | Yen-Di Tsen, Jo Fei Wang, Jong-I Mou | 2015-05-05 |
| 8606387 | Adaptive and automatic determination of system parameters | Chia-Tong Ho, Sunny Wu, Jo Fei Wang, Jong-I Mou | 2013-12-10 |
| 8549012 | Processing exception handling | Jin-Ning Sung, Yen-Di Tsen, Jo Fei Wang, Jong-I Mou | 2013-10-01 |
| 8437870 | System and method for implementing a virtual metrology advanced process control platform | Andy Tsen, Jin-Ning Sung | 2013-05-07 |
| 8406912 | System and method for data mining and feature tracking for fab-wide prediction and control | Jui-Long Chen, Chia-Tong Ho, Hui-Yun Chao, Jong-I Mou | 2013-03-26 |
| 8396583 | Method and system for implementing virtual metrology in semiconductor fabrication | Andy Tsen, Jo Fei Wang, Jong-I Mou | 2013-03-12 |
| 8394719 | System and method for implementing multi-resolution advanced process control | Andy Tsen, Jin-Ning Sung, Jong-I Mou, Yen-Wei Cheng | 2013-03-12 |
| 8224475 | Method and apparatus for advanced process control | Andy Tsen | 2012-07-17 |
| 8108060 | System and method for implementing a wafer acceptance test (“WAT”) advanced process control (“APC”) with novel sampling policy and architecture | Andy Tsen, Jo Fei Wang, Ming-Yu Fan, Jill Wang, Jong-I Mou +1 more | 2012-01-31 |
| 7951615 | System and method for implementing multi-resolution advanced process control | Andy Tsen, Jin-Ning Sung, Jong-I Mou | 2011-05-31 |
| 7187990 | Process controlling method with merged two-control loops | Shi-Shang Jang | 2007-03-06 |