Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162134 | System with substrate carrier deterioration detection and repair | Chih-Wei Lin, Fu-Hsien Li, Yi-Ming Chen, Cheng-Ho Hung | 2024-12-10 |
| 12062561 | Method for transporting wafers | Wei-Chih Chen, Shi-Chi CHEN, Ting-Wei WANG, Kuo-Fong Chuang | 2024-08-13 |
| 12050153 | Method for monitoring transport vehicle and maintenance thereof | Chun-Jung Huang, Kuang-Huan Hsu, Po-Feng Tsai, An-Sheng Chung | 2024-07-30 |
| 11854844 | Method of operating transport system | Chi-Yuan Chu, Wei-Chih Chen, Kuo-Fong Chuang, Cheng-Ho Hung | 2023-12-26 |
| 11848221 | Method of storing workpiece using workpiece storage system | Tzu-Chi Chiu, Ting-Wei WANG, Kuo-Fong Chuang | 2023-12-19 |
| 11605553 | Method and apparatus for unpacking semiconductor wafer container | Fu-Hsien Li, Chi-Feng Tung, Chi-Yuan Chu, Hsiang Yin Shen | 2023-03-14 |
| 11584019 | Substrate carrier deterioration detection and repair | Chih-Wei Lin, Fu-Hsien Li, Yi-Ming Chen, Cheng-Ho Hung | 2023-02-21 |
| 11437258 | Workpiece storage system, method of storing workpiece, and method of transferring workpiece using the same | Tzu-Chi Chiu, Ting-Wei WANG, Kuo-Fong Chuang | 2022-09-06 |
| 11367637 | Method of operating transport system | Chi-Yuan Chu, Wei-Chih Chen, Kuo-Fong Chuang, Cheng-Ho Hung | 2022-06-21 |
| 11348817 | Wafer transport system and method for transporting wafers | Wei-Chih Chen, Shi-Chi CHEN, Ting-Wei WANG, Kuo-Fong Chuang | 2022-05-31 |
| 10867823 | Fault detection method in semiconductor fabrication | Chun-Jung Huang, Yung-Lin Hsu, Kuang-Huan Hsu, Wei-Chih Chen, Chih-Hung Liu | 2020-12-15 |
| 10861692 | Substrate carrier deterioration detection and repair | Chih-Wei Lin, Fu-Hsien Li, Yi-Ming Chen, Cheng-Ho Hung | 2020-12-08 |
| 10840121 | Method and apparatus for unpacking semiconductor wafer container | Fu-Hsien Li, Chi-Feng Tung, Chi-Yuan Chu, Hsiang Yin Shen | 2020-11-17 |
| 10804124 | Wafer processing tool capable of detecting wafer warpage and method for detecting wafer warpage | Chao-Hsiung Yeh, Hsuan Chang, Chin-Tsan Chen, Kuo-Fong Chuang | 2020-10-13 |
| 10618534 | Monitor vehicle for a rail system and method thereof | Shih-Hung Chien, Fu-Hsien Li, Chih-Hung Liu, Yung-Lin Hsu | 2020-04-14 |
| 10464583 | Monitor vehicle for a rail system and method thereof | Shih-Hung Chien, Fu-Hsien Li, Chih-Hung Liu, Yung-Lin Hsu | 2019-11-05 |
| 10161033 | Method for cleaning load port of wafer processing apparatus | Hsueh-Lei Wang, Ting-Wei WANG, Wen-Chieh Tsou | 2018-12-25 |