Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096482 | Apparatus and method for chemical mechanical polishing process control | Keung Hui, Jong-I Mou, Soon-Kang Huang, Yen-Di Tsen | 2018-10-09 |
| 9477219 | Dynamic compensation in advanced process control | Chih-Wei Hsu, Shin-Rung Lu, Jong-I Mou | 2016-10-25 |
| 9102033 | Apparatus and method for target thickness and surface profile uniformity control of multi-head chemical mechanical polishing process | Keung Hui, Huang Soon Kang, Yen-Di Tsen, Jong-I Mou | 2015-08-11 |
| 8549012 | Processing exception handling | Po-Feng Tsai, Yen-Di Tsen, Jo Fei Wang, Jong-I Mou | 2013-10-01 |
| 8437870 | System and method for implementing a virtual metrology advanced process control platform | Po-Feng Tsai, Andy Tsen | 2013-05-07 |
| 8394719 | System and method for implementing multi-resolution advanced process control | Andy Tsen, Po-Feng Tsai, Jong-I Mou, Yen-Wei Cheng | 2013-03-12 |
| 7951615 | System and method for implementing multi-resolution advanced process control | Andy Tsen, Po-Feng Tsai, Jong-I Mou | 2011-05-31 |