Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977655 | Method and system of monitoring E-beam overlay and providing advanced process control | Ming-Yu Fan, Jong-I Mou | 2011-07-12 |
| 7851233 | E-chuck for automated clamped force adjustment and calibration | Sunny Wu, Jong-I Mou | 2010-12-14 |
| 6019849 | Method and apparatus for automatic purge of HMDS vapor piping | Chang Chu Yao, Tsun-Ching Lin, Hsiao-Lan Yeh | 2000-02-01 |
| 5908041 | Method for cleaning a photoresist developer spray stream nozzle | Gey-Fung Wei, Tsun-Ching Lin, Hsiao-Lan Yeh | 1999-06-01 |
| 5763006 | Method and apparatus for automatic purge of HMDS vapor piping | Chang Chu Yao, Tsun-Ching Lin, Hsiao-Lan Yeh | 1998-06-09 |