Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041451 | Method for bin-based control | Sunny Wu, Chih-Sheng Shih, Andy Tsen, Jo Fei Wang, Hsin Kuan | 2011-10-18 |
| 7977655 | Method and system of monitoring E-beam overlay and providing advanced process control | Jo Fei Wang, Ming-Yu Fan | 2011-07-12 |
| 7951615 | System and method for implementing multi-resolution advanced process control | Andy Tsen, Jin-Ning Sung, Po-Feng Tsai | 2011-05-31 |
| 7851233 | E-chuck for automated clamped force adjustment and calibration | Jo Fei Wang, Sunny Wu | 2010-12-14 |