Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9870934 | Electrostatic chuck and temperature-control method for the same | — | 2018-01-16 |
| 8623141 | Piping system and control for semiconductor processing | Chyi Shyuan Chern | 2014-01-07 |
| 7957118 | Multi-zone electrostatic chuck and chucking method | Tung Long Lai, Soon-Kang Huang | 2011-06-07 |