Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8404546 | Source/drain carbon implant and RTA anneal, pre-SiGe deposition | Wei-Yen Woon, Chun-Feng Nieh, Ching-Yi Chen, Hsun Chang, Li-Te Lin | 2013-03-26 |
| 8232114 | RTP spike annealing for semiconductor substrate dopant activation | Chin-Ming Lin, Chi-Ming Yang | 2012-07-31 |
| 8188447 | Field-by-field laser annealing and feed forward process control | Chyi Shyuan Chern, Soon-Kang Huang | 2012-05-29 |
| 8105851 | Nitride film wet stripping | Shao-Yen Ku, Chi-Ming Yang | 2012-01-31 |
| 7838887 | Source/drain carbon implant and RTA anneal, pre-SiGe deposition | Wei-Yen Woon, Chun-Feng Nieh, Ching-Yi Chen, Hsun Chang, Li-Te Lin | 2010-11-23 |