Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966170 | Lithographic overlay correction and lithographic process | Yung-Yao Lee, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2024-04-23 |
| 10831110 | Lithographic overlay correction and lithographic process | Yung-Yao Lee, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2020-11-10 |
| 9805154 | Method of lithography process with inserting scattering bars | Irene Ho, Hung-Chang Hsieh, Kuei-Liang Lu, Ya Hui Chang | 2017-10-31 |
| 9733577 | Intra-field process control for lithography | Chen-Yen Huang, Shin-Rung Lu, Yen-Di Tsen | 2017-08-15 |
| 9588446 | Calibration apparatus and an adjustment method for a lithography apparatus | Chen-Yen Huang, Shin-Rung Lu, Yen-Di Tsen | 2017-03-07 |