Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298672 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2025-05-13 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Che-Chang Hsu, Yen-Shuo Su, Chun-Lin Chang, Li-Jui Chen +1 more | 2025-04-01 |
| 12111583 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2024-10-08 |
| 11822256 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2023-11-21 |
| 11809087 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Li-Jui Chen, Heng-Hsin Liu | 2023-11-07 |
| 11195743 | Adjustable substrate support and adjustment method | Ching-Hua Chen | 2021-12-07 |
| 9574875 | Wafer or reticle thermal deformation measuring techniques | Tsung-Hsun Lee | 2017-02-21 |
| 8616539 | Track spin wafer chuck | Wei-Hsiang Tseng, Jui-Chun Peng, Ho-Ping Chen, CHIA-YUN LEE | 2013-12-31 |