Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Chi-Ming Yang | 2025-08-05 |
| 12265336 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Yen-Shuo Su, Chun-Lin Chang, Kai-Fa Ho, Li-Jui Chen +1 more | 2025-04-01 |
| 12210295 | Reticle cleaning device and method of use | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-28 |
| 12189298 | EUV vessel perimeter flow auto adjustment | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2025-01-07 |
| 12055865 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Chi-Ming Yang | 2024-08-06 |
| 11982944 | Method of lithography process and transferring a reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2024-05-14 |
| 11747735 | EUV vessel perimeter flow auto adjustment | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-09-05 |
| 11703763 | Method of lithography process using reticle container with discharging device | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2023-07-18 |
| 11650512 | Reticle cleaning device and method of use | Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-16 |
| 11360392 | Photolithography device having illuminator and method for adjusting intensity uniformity | Chieh-Jen Cheng, Li-Jui Chen, Shang-Chieh Chien, Chao-Chen Chang, Ssu-Yu Chen | 2022-06-14 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-05-03 |
| 11204556 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2021-12-21 |
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-09-14 |
| 11086237 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Chi-Ming Yang | 2021-08-10 |
| 10877378 | Vessel for extreme ultraviolet radiation source | Ssu-Yu Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10802394 | Method for discharging static charges on reticle | Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen +1 more | 2020-10-13 |
| 10791616 | Radiation source apparatus | Ssu-Yu Chen, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-09-29 |
| 10747119 | Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation source | Yu-Chih Huang, Chi-Ming Yang, Li-Jui Chen, Po-Chung Cheng | 2020-08-18 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Chia-Hsin CHOU, Tzung-Chi Fu, Li-Jui Chen +1 more | 2020-07-14 |
| 10083377 | Sensing method for a counterfeit bill detector | Tien-Lu Hsu, Chun-Yen Chen, Shin-Nung LU, JHIH-CHENG SYU | 2018-09-25 |