Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12028959 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-07-02 |
| 11997778 | Replacement and refill method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2024-05-28 |
| 11982944 | Method of lithography process and transferring a reticle | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2024-05-14 |
| 11703763 | Method of lithography process using reticle container with discharging device | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2023-07-18 |
| 11599030 | Droplet catcher, droplet catcher system of EUV lithography apparatus, and maintenance method of the EUV lithography apparatus | Shih-Yu Tu, Po-Chung Cheng, Li-Jui Chen, Han-Lung Chang | 2023-03-07 |
| 11528798 | Replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11320733 | Reticle with conductive material structure | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |
| 11134558 | Droplet generator assembly and method for using the same and radiation source apparatus | Shih-Yu Tu, Yu-Kuang SUN, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen +6 more | 2021-09-28 |
| 11067906 | Droplet catcher system of EUV lithography apparatus and EUV lithography apparatus maintenance method | Shih-Yu Tu, Po-Chung Cheng, Li-Jui Chen, Han-Lung Chang | 2021-07-20 |
| 11032897 | Refill and replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2021-06-08 |
| 10880980 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2020-12-29 |
| 10802394 | Method for discharging static charges on reticle | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-10-13 |