Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121018 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2021-09-14 |
| 10714371 | Method and apparatus for lithography in semiconductor fabrication | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2020-07-14 |