Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429783 | EUV lithography apparatus and operating method for mitigating contamination | I-Hsiung Huang, Yung-Cheng Chen | 2025-09-30 |
| 9709904 | Lithography apparatus having dual reticle edge masking assemblies and method of use | Chin-Hsiang Lin, Heng-Hsin Liu, Jui-Chun Peng | 2017-07-18 |
| 9658536 | In-line inspection and clean for immersion lithography | Heng-Hsin Liu, Jui-Chun Peng | 2017-05-23 |
| 9081297 | Lithography apparatus having dual reticle edge masking assemblies and method of use | Chin-Hsiang Lin, Heng-Hsin Liu, Jui-Chun Peng | 2015-07-14 |
| 8237132 | Method and apparatus for reducing down time of a lithography system | Jui-Chun Peng, Heng-Jen Lee, I-Hsiung Huang | 2012-08-07 |
| 7285147 | Air supply systems and pressure adjustment devices for use therewith | Po-Sung Kuo, Yung-Dar Chen, Jheng-Long Chou, Ming-Wen Huang | 2007-10-23 |