KL

Kuo-Liang Lu

TSMC: 30 patents #1,141 of 12,232Top 10%
Overall (All Time): #120,715 of 4,157,543Top 3%
30
Patents All Time

Issued Patents All Time

Showing 1–25 of 30 patents

Patent #TitleCo-InventorsDate
12243719 Gas distribution ring for process chamber Po-Hsiang Wang, Min-Chang Ching, Bo-Han Chu 2025-03-04
12211737 Cleaning chamber for metal oxide removal Yen-Liang Lin, Chia-Wen Zhong, Yao-Wen Chang, Min-Chang Ching, Cheng-Yuan Tsai +1 more 2025-01-28
11742321 Apparatus for bond wave propagation control Xin-Hua Huang, Kuan-Liang Liu, Ping-Yin Liu 2023-08-29
11031369 Apparatus for bond wave propagation control Xin-Hua Huang, Kuan-Liang Liu, Ping-Yin Liu 2021-06-08
10889097 Wafer debonding system and method Chang-Chen Tsao, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng, Yeur-Luen Tu +1 more 2021-01-12
10569520 Wafer debonding system and method Chang-Chen Tsao, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng, Yeur-Luen Tu +1 more 2020-02-25
10497667 Apparatus for bond wave propagation control Xin-Hua Huang, Kuan-Liang Liu, Ping-Yin Liu 2019-12-03
10155369 Wafer debonding system and method Chang-Chen Tsao, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng, Yeur-Luen Tu +1 more 2018-12-18
10056275 Immersion de-taping Ching Tasi Liu, Fu-Chen Chang, Chien-Chen Li, Te Lung Liu 2018-08-21
9613845 Immersion de-taping Ching Tasi Liu, Fu-Chen Chang, Chien-Chen Li, Te Lung Liu 2017-04-04
7730898 Semiconductor wafer lifter Yang Cheng Hung, Tseng Wen Song, Chen Peir Horng 2010-06-08
7009772 High transmittance overcoat for microlens arrays in semiconductor color imagers Yu-Kung Hsiao, Sheng-Liang Pan, Bii-Juno Chang 2006-03-07
6926818 Method to enhance the adhesion between dry film and seed metal Yih-Ann Lin, Tung-Heng Shie, Kai-Ming Ching, Sheng-Liang Pan 2005-08-09
6878642 Method to improve passivation openings by reflow of photoresist to eliminate tape residue Hung-Jen Hsu, Yu-Kung Hsiao, Chih-Kung Chang, Sheng-Liang Pan 2005-04-12
6821810 High transmittance overcoat for optimization of long focal length microlens arrays in semiconductor color imagers Yu-Kung Hsiao, Sheng-Liang Pan, Bii-Juno Chang 2004-11-23
6796315 Method to remove particulate contamination from a solution bath Wen-Song Tseng 2004-09-28
6671396 Method to monitor stepper lens quality in color filter process Chih-Kung Chang, Bii-Jung Chang, Sheng-Liang Pang 2003-12-30
6623912 Method to form the ring shape contact to cathode on wafer edge for electroplating in the bump process when using the negative type dry film photoresist Kai-Ming Ching, Yu-Kung Hsiao, Sheng-Liang Pan 2003-09-23
6590239 Color filter image array optoelectronic microelectronic fabrication with a planarizing layer formed upon a concave surfaced color filter region Chung-Sheng Hsiung, Yu-Kung Hsiao, Chih-Kung Chang, Fu-Tien Wong, Sung-Yung Yang +1 more 2003-07-08
6586322 Method of making a bump on a substrate using multiple photoresist layers Chih-Cheng Chiu, Sheng-Liang Pan 2003-07-01
6531266 Rework procedure for the microlens element of a CMOS image sensor Chih-Kung Chang, Kuang-Peng Lin, Yu-Kung Hsiao, Fu-Tien Weng, Bii-Junq Chang 2003-03-11
6495813 Multi-microlens design for semiconductor imaging devices to increase light collection efficiency in the color filter process Yang-Tung Fan, Bii-Cheng Chang, Sheng-Liang Pan 2002-12-17
6482331 Method for preventing contamination in a plasma process chamber Yung-Chih Yao 2002-11-19
6468704 Method for improved photomask alignment after epitaxial process through 90° orientation change Chi-Hung Liao, Yih-Ann Lin, Sheng-Liang Pan, Cheng-Yu Chu, Yu-Hsi Wang 2002-10-22
6417022 Method for making long focal length micro-lens for color filters Yu-Kung Hsiao, Sheng-Liang Pan, Bi-Cheng Chang 2002-07-09