Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766559 | Edge-dominant alignment method in exposure scanner system | Ying-Ying Wang, Yi-Ping Hsieh, Heng-Hsin Liu | 2017-09-19 |
| 9646896 | Lithographic overlay sampling | Yi-Ping Hsieh, Ying-Ying Wang, Shin-Rung Lu | 2017-05-09 |
| 9587929 | Focus metrology method and photolithography method and system | Hung-Ming Kuo, Jui-Chun Peng, Heng-Hsin Liu | 2017-03-07 |
| 9563946 | Overlay metrology method and overlay control method and system | Ying-Ying Wang, Shang-Wern Chang, Heng-Hsin Liu | 2017-02-07 |
| 9188876 | Method of determining overlay error and control system for dynamic control of reticle position | Sophia Wang, Fei-Gwo Tsai, Heng-Hsin Liu | 2015-11-17 |
| 9176396 | Overlay sampling methodology | Ying-Ying Wang | 2015-11-03 |
| 9164398 | Overlay metrology method | Ying-Ying Wang, Yi-Ping Hsieh, Heng-Hsin Liu | 2015-10-20 |
| 8860941 | Tool induced shift reduction determination for overlay metrology | Ying-Ying Wang, Heng-Hsin Liu, Heng-Jen Lee | 2014-10-14 |
| 8852673 | Defect monitoring for resist layer | Che-Rong Laing, Li-Kong Turn, Ping-Hsi Yang | 2014-10-07 |
| 8703368 | Lithography process | Ying-Ying Wang, Heng-Hsin Liu, Chin-Hsiang Lin | 2014-04-22 |
| 8476003 | Iterative rinse for semiconductor fabrication | Wei-Hong Chuang, Li-Shiuan Chen, Ping-Hsi Yang | 2013-07-02 |