Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8852673 | Defect monitoring for resist layer | Che-Rong Laing, Li-Kong Turn, Yung-Yao Lee | 2014-10-07 |
| 8476003 | Iterative rinse for semiconductor fabrication | Yung-Yao Lee, Wei-Hong Chuang, Li-Shiuan Chen | 2013-07-02 |