Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11378889 | Immersion lithography system and method of using | Wei-Chih Lin, Chih-Chien Lin | 2022-07-05 |
| 11244827 | Semiconductor manufacturing method and apparatus thereof | Wen-Chih Wang | 2022-02-08 |
| 11226562 | Semiconductor structure and manufacturing method thereof | Yi-Ping Hsieh | 2022-01-18 |
| 11221564 | Method for improving exposure performance and apparatus thereof | Chao LU | 2022-01-11 |
| 11181824 | Semiconductor apparatus and method for baking coating layer | Chen Yi Hsu | 2021-11-23 |
| 11163235 | Apparatus for forming a photoresist layer, method for forming a masking layer, and method for forming a photoresist layer | Chen Yi Hsu | 2021-11-02 |
| 11048170 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Chen Yi Hsu | 2021-06-29 |
| 11035619 | Drainage for temperature and humidity controlling system | Wei Chang Cheng, Chi-Hung Liao, Chien-Hung Wang, Guan-Yu Lin | 2021-06-15 |
| 11022018 | Exhaust system and method of using | Wei Chang Cheng, Ping-Hsu Chen, Chi-Hung Liao, T. S. Lo | 2021-06-01 |
| 11014103 | Substrate processing apparatus and substrate processing method | Wei-Hsiang Tseng | 2021-05-25 |
| 10942329 | Optical module structure | Ho-Ping Chen | 2021-03-09 |
| 10875148 | Apparatus and methods for chemical mechanical polishing | He Hui Peng, James Jeng-Jyi Hwang, Chi-Ming Yang, Yen-Di Tsen | 2020-12-29 |
| 10867872 | Method and apparatus for manufacturing semiconductor structure | Wei-Hsiang Tseng | 2020-12-15 |
| 10831110 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Heng-Hsin Liu, Chin-Chen Wang, Ying-Ying Wang | 2020-11-10 |
| 10792697 | Drippage prevention system and method of operating same | Chien-Hung Wang, Chun-Chih Lin, Chi-Hung Liao, Wei Chang Cheng | 2020-10-06 |
| 10747128 | Exposure method and exposure apparatus | Heng-Hsin Liu, Hung-Ming Kuo, Jui-Chun Peng | 2020-08-18 |
| 10691020 | Apparatus for dispensing liquid material and method for fabricating semiconductor device | Chen Yi Hsu | 2020-06-23 |
| 10473021 | Exhaust system and method of using | Wei Chang Cheng, Ping-Hsu Chen, Chi-Hung Liao, T. S. Lo | 2019-11-12 |
| 10157741 | Method of manufacturing a semiconductor structure | En-Chao Shen | 2018-12-18 |
| 10061215 | Patterning method and patterning apparatus for fabricating a resist pattern | Jui-Chun Peng, Ho-Ping Chen, Heng-Hsin Liu | 2018-08-28 |
| 10061211 | Method for layoutless overlay control | Yi-Ping Hsieh | 2018-08-28 |
| 9978625 | Semiconductor method and associated apparatus | Jui-Chun Peng, Ho-Ping Chen, Heng-Hsin Liu | 2018-05-22 |
| 9927719 | Overlay sampling methodology | Ying-Ying Wang | 2018-03-27 |
| 9841687 | Synchronized integrated metrology for overlay-shift reduction | Heng-Hsin Liu, Jui-Chun Peng, Yung-Cheng Chen | 2017-12-12 |
| 9772561 | Semiconductor manufacturing method and tool | Heng-Hsin Liu, Yi-Ping Hsieh, Ying-Ying Wang | 2017-09-26 |