Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189306 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2025-01-07 |
| 11835866 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2023-12-05 |
| 11487210 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2022-11-01 |