Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400866 | Method and system for manufacturing a semiconductor device | Yao-Hwan Kao | 2025-08-26 |
| 12265327 | Semiconductor manufacturing apparatus and method thereof | Yao-Hwan Kao | 2025-04-01 |
| 12124168 | Method and apparatus for coating photoresist over a substrate | Jing C. Chang, Wei-Hsiang Tseng | 2024-10-22 |
| 11806743 | Spin dispenser module substrate surface protection system | Yao-Hwan Kao, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2023-11-07 |
| 11344910 | Spin dispenser module substrate surface protection system | Yao-Hwan Kao, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2022-05-31 |
| 9855579 | Spin dispenser module substrate surface protection system | Yao-Hwan Kao, Shang-Sheng Li, Kuo-Pin Chen, Hsiang-Kai Tseng, Chuan-Wei Chen | 2018-01-02 |
| 9793143 | Semiconductor processing apparatus and method of operating the same | Yao-Hwan Kao, Shang-Sheng Li, Yung-Chang Lu, Jian-Yuan Lai, Kai-Yuan Cheng | 2017-10-17 |
| 9589820 | Semiconductor apparatus and adjustment method | Yao-Hwan Kao, Po-Chun Lee | 2017-03-07 |
| 9536759 | Baking apparatus and method | Shang-Sheng Li, Yao-Hwan Kao | 2017-01-03 |
| 9081306 | Method of optimizing lithography tools utilization | Yao-Hwan Kao, Fei-Gwo Tsai, Li-Kong Tum, Steven Liu | 2015-07-14 |
| 8873020 | Cleaning nozzle for advanced lithography process | Shang-Sheng Li | 2014-10-28 |