Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2025-07-01 |
| 12302484 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2025-05-13 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2025-02-25 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen +1 more | 2025-01-07 |
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2024-12-31 |
| 12072633 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Tsung Chuan Lee | 2024-08-27 |
| 12013641 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Yahru Cheng, Tsung Chuan Lee | 2024-06-18 |
| 11973302 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2024-04-30 |
| 11829082 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2023-11-28 |
| 11792909 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-10-17 |
| 11774844 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2023-10-03 |
| 11737200 | Residual gain monitoring and reduction for EUV drive laser | Chun-Lin Chang, Jen-Hao Yeh, Han-Lung Chang, Tzung-Chi Fu, Li-Jui Chen +1 more | 2023-08-22 |
| 11720025 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Tsung Chuan Lee | 2023-08-08 |
| 11723141 | EUV radiation generation methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng | 2023-08-08 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2023-07-18 |
| 11703762 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Yahru Cheng, Tsung Chuan Lee | 2023-07-18 |
| 11630393 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |
| 11617255 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2023-03-28 |
| 11588293 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee-Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2023-02-21 |
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-10-25 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |
| 11392022 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Tsung Chuan Lee | 2022-07-19 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-05-17 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-03-15 |