Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10342109 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2019-07-02 |
| 10338475 | Light source for lithography exposure process | Hsin-Feng Chen, Han-Lung Chang, Li-Jui Chen | 2019-07-02 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2019-06-04 |
| 10165664 | Apparatus for decontaminating windows of an EUV source module | Hsin-Feng Chen, Li-Jui Chen, Han-Lung Chang | 2018-12-25 |
| 9618855 | Lithography system and method for mask inspection | Fei-Gwo Tsai, Chieh-Huan Ku | 2017-04-11 |