Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372887 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2025-07-29 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12216413 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-02-04 |
| 12189293 | Method of manufacturing a semiconductor device | Wei-Han Lai, Ching-Yu Chang | 2025-01-07 |
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2024-12-24 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2024-10-29 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Sheng-Kang Yu +5 more | 2024-09-17 |
| 12085865 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2024-09-10 |
| 12055867 | Lithography contamination control | Tai-Yu Chen, Cho-Ying Lin, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2024-08-06 |
| 12044975 | Extreme ultraviolet control system | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2024-07-23 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |
| 11914301 | Photoresist, method of manufacturing a semiconductor device and method of extreme ultraviolet lithography | Wei-Han Lai, Ching-Yu Chang | 2024-02-27 |
| 11841625 | Device and method to remove debris from an extreme ultraviolet (EUV) lithography system | Chun-Han Lin, Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2023-12-12 |
| 11768437 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2023-09-26 |
| 11703769 | Light source, EUV lithography system, and method for performing circuit layout patterning process | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2023-07-18 |
| 11693324 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-07-04 |
| 11675272 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Shang-Chieh Chien, Chun-Lin Chang, Li-Jui Chen +1 more | 2023-06-13 |
| 11662668 | Lithography contamination control | Tai-Yu Chen, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2023-05-30 |
| 11647578 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang Chen, Sheng-Kang Yu +5 more | 2023-05-09 |
| 11632849 | Method and apparatus for mitigating contamination | Tai-Yu Chen, Hung-Jung Hsu, Cho-Ying Lin, Shang-Chieh Chien, Li-Jui Chen +1 more | 2023-04-18 |
| 11630393 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2023-04-18 |
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-10-25 |
| 11467498 | Extreme ultraviolet control system | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Shang-Chieh Chien, Han-Lung Chang, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |