Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11392040 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2022-07-19 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2022-03-08 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2022-01-11 |
| 11153959 | Apparatus and method for generating extreme ultraviolet radiation | Chun-Chia Hsu, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Yen-Shuo Su +1 more | 2021-10-19 |
| 10993308 | Light source for lithography exposure process | Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2021-04-27 |
| 10969690 | Extreme ultraviolet control system for adjusting droplet illumination parameters | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-04-06 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |
| 10859918 | Semiconductor apparatus and method of operating the same | Kuan-Hung Chen, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-12-08 |
| 10842009 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2020-11-17 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 10802406 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Liu Bo-Tsun, Li-Jui Chen +1 more | 2020-10-13 |
| 10802405 | Radiation source for lithography exposure process | Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2020-10-13 |
| 10712676 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-07-14 |
| 10495987 | Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2019-12-03 |
| 10477663 | Light source for lithography exposure process | Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2019-11-12 |
| 10314154 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2019-06-04 |
| 10274844 | Lithography apparatus and method for protecting a reticle | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2019-04-30 |