Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11071191 | Extreme ultraviolet radiation source and cleaning method thereof | Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2021-07-20 |
| 10955762 | Radiation source apparatus and method for decreasing debris in radiation source apparatus | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2021-03-23 |
| 10824083 | Light source, EUV lithography system, and method for generating EUV radiation | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2020-11-03 |
| 6676770 | Apparatus and method for removing particles from wafer pods | Wuei-Lung Hou, Ming-Chi Ho, Hong-Yi Chen | 2004-01-13 |