Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374548 | Photoresist layer outgassing prevention | Yen-Yu Chen, Chih-Cheng Liu, Yi-Chen Kuo, Jr-Hung Li, Tze-Liang Lee +1 more | 2025-07-29 |
| 12354874 | Method of manufacturing semiconductor devices and pattern formation method | An-Ren Zi, Chun-Chih HO, Ching-Yu Chang | 2025-07-08 |
| 12272554 | Method of manufacturing a semiconductor device | Jia-Lin WEI, Ming-Hui Weng, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen +4 more | 2025-04-08 |
| 12271113 | Method of manufacturing a semiconductor device | Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Ming-Hui Weng, Yen-Yu Chen +4 more | 2025-04-08 |
| 12222643 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Chi-Ming Yang, Tze-Liang Lee +1 more | 2025-02-11 |
| 12159787 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Chi-Ming Yang, Tze-Liang Lee +1 more | 2024-12-03 |
| 12135501 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more | 2024-11-05 |
| 12106961 | Humidity control or aqueous treatment for EUV metallic resist | An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin | 2024-10-01 |
| 12094952 | Air spacer formation with a spin-on dielectric material | Ting-Ting Chen, Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tsu-Hsiu Perng +3 more | 2024-09-17 |
| 12087592 | Ambient controlled two-step thermal treatment for spin-on coating layer planarization | Chen-Fong Tsai, Ya-Lun CHEN, Tsai-Yu Huang, Huicheng Chang, Yee-Chia Yeo | 2024-09-10 |
| 12057315 | Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern | Yi-Chen Kuo, Chih-Cheng Liu, Ming-Hui Weng, Jia-Lin WEI, Yen-Yu Chen +4 more | 2024-08-06 |
| 12013641 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Bo-Tsun Liu, Tsung Chuan Lee | 2024-06-18 |
| 12002675 | Photoresist layer outgassing prevention | Yen-Yu Chen, Chih-Cheng Liu, Yi-Chen Kuo, Jr-Hung Li, Tze-Liang Lee +1 more | 2024-06-04 |
| 11971657 | Photoresist developer and method of developing photoresist | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2024-04-30 |
| 11942322 | Method of manufacturing semiconductor devices and pattern formation method | An-Ren Zi, Chun-Chih HO, Ching-Yu Chang | 2024-03-26 |
| 11901189 | Ambient controlled two-step thermal treatment for spin-on coating layer planarization | Chen-Fong Tsai, Ya-Lun CHEN, Tsai-Yu Huang, Huicheng Chang, Yee-Chia Yeo | 2024-02-13 |
| 11822237 | Method of manufacturing a semiconductor device | Ming-Hui Weng, Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI +5 more | 2023-11-21 |
| 11784046 | Method of manufacturing a semiconductor device | Jia-Lin WEI, Ming-Hui Weng, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen +4 more | 2023-10-10 |
| 11703762 | Method of reducing undesired light influence in extreme ultraviolet exposure | Chih-Tsung Shih, Chen-Ming Wang, Bo-Tsun Liu, Tsung Chuan Lee | 2023-07-18 |
| 11705332 | Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern | Yi-Chen Kuo, Chih-Cheng Liu, Ming-Hui Weng, Jia-Lin WEI, Yen-Yu Chen +4 more | 2023-07-18 |
| 11626482 | Air spacer formation with a spin-on dielectric material | Ting-Ting Chen, Chen-Han Wang, Keng-Chu Lin, Shuen-Shin Liang, Tsu-Hsiu Perng +3 more | 2023-04-11 |
| 11276568 | Method for manufacturing a semiconductor device and a coating material | Yu Ling Chien, Chien-Chih Chen, Chin-Hsiang Lin, Ching-Yu Chang | 2022-03-15 |
| 11029602 | Photoresist composition and method of forming photoresist pattern | An-Ren Zi, Chin-Hsiang Lin, Ching-Yu Chang | 2021-06-08 |
| 11003082 | Method for forming semiconductor structure | Chien-Chih Chen, Ching-Yu Chang | 2021-05-11 |
| 10768527 | Resist solvents for photolithography applications | Yu-Chung Su, Kuan-Hsin Lo, Ching-Yu Chang, Chin-Hsiang Lin | 2020-09-08 |