MW

Ming-Hui Weng

TSMC: 32 patents #1,063 of 12,232Top 9%
Overall (All Time): #104,796 of 4,157,543Top 3%
33
Patents All Time

Issued Patents All Time

Showing 1–25 of 33 patents

Patent #TitleCo-InventorsDate
12374548 Photoresist layer outgassing prevention Yen-Yu Chen, Chih-Cheng Liu, Yi-Chen Kuo, Jr-Hung Li, Tze-Liang Lee +1 more 2025-07-29
12272554 Method of manufacturing a semiconductor device Jia-Lin WEI, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen, Yahru Cheng +4 more 2025-04-08
12271113 Method of manufacturing a semiconductor device Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Yen-Yu Chen, Jr-Hung Li +4 more 2025-04-08
12222643 Method of manufacturing a semiconductor device and pattern formation method Chih-Cheng Liu, Jr-Hung Li, Yahru Cheng, Chi-Ming Yang, Tze-Liang Lee +1 more 2025-02-11
12222654 Lithography method for positive tone development Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin 2025-02-11
12222653 Method for forming semiconductor structure An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu 2025-02-11
12159787 Method of manufacturing a semiconductor device and pattern formation method Chih-Cheng Liu, Jr-Hung Li, Yahru Cheng, Chi-Ming Yang, Tze-Liang Lee +1 more 2024-12-03
12135501 Method of manufacturing a semiconductor device Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Yen-Yu Chen +5 more 2024-11-05
12074025 Photoresist developer and method of developing photoresist An-Ren Zi, Ching-Yu Chang, Chen-Yu Liu 2024-08-27
12057315 Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern Yi-Chen Kuo, Chih-Cheng Liu, Jia-Lin WEI, Yen-Yu Chen, Jr-Hung Li +4 more 2024-08-06
12025920 Lithography techniques for reducing defects Ching-Yu Chang 2024-07-02
12002675 Photoresist layer outgassing prevention Yen-Yu Chen, Chih-Cheng Liu, Yi-Chen Kuo, Jr-Hung Li, Tze-Liang Lee +1 more 2024-06-04
11923326 Bump structure and method of manufacturing bump structure Ching-Yu Chang, Ming-Da Cheng 2024-03-05
11822237 Method of manufacturing a semiconductor device Chen-Yu Liu, Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Yen-Yu Chen +5 more 2023-11-21
11784046 Method of manufacturing a semiconductor device Jia-Lin WEI, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen, Yahru Cheng +4 more 2023-10-10
11705332 Photoresist layer surface treatment, cap layer, and method of forming photoresist pattern Yi-Chen Kuo, Chih-Cheng Liu, Jia-Lin WEI, Yen-Yu Chen, Jr-Hung Li +4 more 2023-07-18
11694896 Photoresist developer and method of developing photoresist An-Ren Zi, Ching-Yu Chang, Chen-Yu Liu 2023-07-04
11456266 Bump structure and method of manufacturing bump structure Ching-Yu Chang, Ming-Da Cheng 2022-09-27
11281107 Method for performing lithography process with post treatment Ching-Yu Chang, Chin-Hsiang Lin 2022-03-22
11143963 Negative tone developer for extreme ultraviolet lithography Chen-Yu Liu, Wei-Han Lai, Tzu-Yang Lin, Ching-Yu Chang, Chin-Hsiang Lin 2021-10-12
11079681 Lithography method for positive tone development Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin 2021-08-03
11022886 Bottom-up material formation for planarization Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin 2021-06-01
11009796 Method for forming semiconductor structure An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu 2021-05-18
10879108 Topographic planarization method for lithography process Tzu-Yang Lin, Cheng-Han Wu, Chin-Hsiang Lin 2020-12-29
10866515 Lithography process using photoresist material with photosensitive functional group Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin, Siao-Shan Wang 2020-12-15