Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866517 | Lithography techniques for reducing resist swelling | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2020-12-15 |
| 10691023 | Method for performing lithography process with post treatment | Ching-Yu Chang, Chin-Hsiang Lin | 2020-06-23 |
| 10520833 | Extreme ultraviolet lithography system | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |
| 10520822 | Lithography techniques for reducing resist swelling | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |
| 10520820 | Negative tone developer for extreme ultraviolet lithography | Chen-Yu Liu, Wei-Han Lai, Tzu-Yang Lin, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |
| 10083832 | Under layer composition and method of manufacturing semiconductor device | Chen-Yu Liu, Chin-Hsiang Lin, Ching-Yu Chang | 2018-09-25 |
| 10032640 | Formation of semiconductor structure with a photoresist cross link and de-cross link process | Chien-Hua Huang, Chung-Ju Lee, Tzu-Hui Wei | 2018-07-24 |
| D405834 | Ball game target gate | Kwang-Chu Yang | 1999-02-16 |