Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12167525 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2024-12-10 |
| 11829082 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2023-11-28 |
| 11832372 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2023-11-28 |
| 11275318 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-03-15 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2022-03-08 |
| 11092555 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2021-08-17 |
| 10928741 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2021-02-23 |
| 10875060 | Method and apparatus for removing debris from collector | Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang, Shang-Chieh Chien +3 more | 2020-12-29 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2020-07-21 |
| 10656539 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2020-05-19 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Li-Kai Cheng, Tzung-Chi Fu, Bo-Tsun Liu +4 more | 2019-10-01 |