Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12216399 | Method of manufacturing semiconductor device | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2025-02-04 |
| 12181791 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2024-12-31 |
| 12066765 | Operating method for preventing photomask particulate contamination | Jui-Chieh Chen, Chih-Tsung Shih, Tsung Chuan Lee | 2024-08-20 |
| 11940727 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2024-03-26 |
| 11774844 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2023-10-03 |
| 11614683 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2023-03-28 |
| 11506985 | Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination | Jui-Chieh Chen, Chih-Tsung Shih, Tsung Chuan Lee | 2022-11-22 |
| 11415879 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2022-08-16 |
| 11275301 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2022-03-15 |
| 10824080 | Method to reduce native defect printability | Chih-Tsung Shih, Tsung Chuan Lee | 2020-11-03 |
| 9911575 | Apparatus for charged particle lithography system | Shih-Chi Wang, Hui-Min Huang, Jaw-Jung Shin, Shy-Jay Lin, Burn Jeng Lin | 2018-03-06 |
| 9633958 | Bonding pad surface damage reduction in a formation of digital pattern generator | Chih Wei Lu, Hui-Min Huang, Tien-I Bao | 2017-04-25 |
| 9390891 | Apparatus for charged particle lithography system | Shih-Chi Wang, Hui-Min Huang, Jaw-Jung Shin, Shy-Jay Lin, Burn Jeng Lin | 2016-07-12 |
| 8625076 | Wafer edge exposure module | Yung-Cheng Chen, Heng-Jen Lee | 2014-01-07 |
| 8101340 | Method of inhibiting photoresist pattern collapse | Ching-Yu Chang, Heng-Jen Lee, Chin-Hsiang Lin, Hua-Tai Lin, Kuei-Shun Chen +4 more | 2012-01-24 |