Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368066 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yi-Ming Dai | 2025-07-22 |
| 12347716 | Method for cleaning electrostatic chuck | Chi-Hung Liao | 2025-07-01 |
| 12222611 | Variable pitch fan-out routing for display panels having narrow borders | You Ben Yin, Quan Yu | 2025-02-11 |
| 12170218 | Method for cleaning electrostatic chuck | Chi-Hung Liao | 2024-12-17 |
| 12066756 | Method for lithography process | Chi-Hung Liao | 2024-08-20 |
| 12027407 | Substrate support apparatus and method | Chi-Hung Liao, Fei-Gwo Tsai | 2024-07-02 |
| 11914302 | Method and apparatus for controlling droplet in extreme ultraviolet light source | Chi-Hung Liao | 2024-02-27 |
| 11899377 | System and method for thermal management of reticle in semiconductor manufacturing | Chi-Hung Liao | 2024-02-13 |
| 11809084 | Radiation source supply system for lithographic tools | Chi-Hung Liao | 2023-11-07 |
| 11676974 | Distributed and multi-group pad arrangement | Haijun Chen, Tatao Hsu, Jonathan Huang | 2023-06-13 |
| 11592715 | Pad arrangement in fan-out areas of display devices | Quan Yu, Haijun Chen, Tatao Hsu, Jonathan Huang | 2023-02-28 |
| 11508602 | Cleaning tool | Chi-Hung Liao | 2022-11-22 |
| 11448955 | Mask for lithography process and method for manufacturing the same | Chi-Hung Liao | 2022-09-20 |
| 11435669 | Radiation source supply system for lithographic tools | Chi-Hung Liao | 2022-09-06 |
| 11398693 | Card edge connector | Che-Ting Wu, Guo Chen | 2022-07-26 |
| 11367644 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yi-Ming Dai | 2022-06-21 |
| 11287751 | System and method for lens heating control | Chi-Hung Liao | 2022-03-29 |
| D945372 | Electrical connector | Chih-Wei Chen, Shin-Tai Ho, Yu-Hsiung Lin | 2022-03-08 |
| 11256181 | Apparatus and method for removing particles in semiconductor manufacturing | Chi-Hung Liao | 2022-02-22 |
| 11243478 | System and method for thermal management of reticle in semiconductor manufacturing | Chi-Hung Liao | 2022-02-08 |
| 11237483 | Method and apparatus for controlling droplet in extreme ultraviolet light source | Chi-Hung Liao | 2022-02-01 |
| 11221563 | Lens control for lithography tools | Chi-Hung Liao | 2022-01-11 |
| 11056371 | Tool and method for cleaning electrostatic chuck | Chi-Hung Liao | 2021-07-06 |
| 11018455 | Connector and transmission wafer thereof | Kai Wu, Che-Ting Wu, Chung-Nan Pao, Chih-Wei Chen | 2021-05-25 |
| 11003087 | Radiation source supply system for lithographic tools | Chi-Hung Liao | 2021-05-11 |