Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368066 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2025-07-22 |
| 12344929 | Multi-functional shutter disk for thin film deposition chamber | Wen-Hao Cheng, Yen-Yu Chen | 2025-07-01 |
| 12341042 | Method for depositing target material in deposition chamber with tiltable workpiece holder | Hsuan-Chih Chu, Wen-Hao Cheng, Yen-Yu Chen | 2025-06-24 |
| 12211756 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2025-01-28 |
| 12176253 | Deposition system and method | Wen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen | 2024-12-24 |
| 12104268 | Treatment system and method | Zong-Kun LIN, Hsuan-Chih Chu, Chien-Hsun Pan, Yen-Yu Chen | 2024-10-01 |
| 12033965 | Semiconductor device and method of forming the same | Wen-Hao Cheng, Yen-Yu Chen, Chih-Wei Lin | 2024-07-09 |
| 11920237 | Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber | Wen-Hao Cheng, Yen-Yu Chen | 2024-03-05 |
| 11823964 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2023-11-21 |
| 11742231 | Movable wafer holder for film deposition chamber having six degrees of freedom | Hsuan-Chih Chu, Wen-Hao Cheng, Yen-Yu Chen | 2023-08-29 |
| 11732379 | Treatment system and method | Zong-Kun LIN, Hsuan-Chih Chu, Chien-Hsun Pan, Yen-Yu Chen | 2023-08-22 |
| 11728226 | Deposition system and method | Wen-Hao Cheng, Hsuan-Chih Chu, Yen-Yu Chen | 2023-08-15 |
| 11682639 | Semiconductor device and method of forming the same | Wen-Hao Cheng, Yen-Yu Chen, Chih-Wei Lin | 2023-06-20 |
| 11492700 | Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber | Wen-Hao Cheng, Yen-Yu Chen | 2022-11-08 |
| 11387123 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin | 2022-07-12 |
| 11367644 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2022-06-21 |
| 11081341 | Apparatus for fabricating a semiconductor device with target sputtering and target sputtering method for fabricating the semiconductor device | Shih Wei Bih, Yen-Yu Chen | 2021-08-03 |
| 11075179 | Semiconductor device and method of forming the same | Wen-Hao Cheng, Yen-Yu Chen, Chih-Wei Lin | 2021-07-27 |
| 10770327 | System and method for correcting non-ideal wafer topography | Cheng-Mu Lin, Chi-Hung Liao, Yueh-Lin Yang | 2020-09-08 |
| 10651066 | Metrology method in wafer transportation | Powen Huang, Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin | 2020-05-12 |
| 10345716 | Metrology method in reticle transportation | Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin | 2019-07-09 |
| 9811000 | Photolithography tool and method thereof | Chia-Feng Liao, Chun-Hsien Lin, Pei-Yi Su, Chung-Hsing Lee, Chien-Ko Liao +4 more | 2017-11-07 |
| 9707571 | Apparatus and method for supplying chemical solution on semiconductor substrate | Shih-Jhang Tian, Pei-Yi Su | 2017-07-18 |
| 8129762 | Image sensor | Fu-Tien Weng, Yu-Kung Hsiao, Hung-Jen Hsu, Chin-Chen Kuo, Te-Fu Tseng +4 more | 2012-03-06 |
| 8048589 | Phase shift photomask performance assurance method | Chien-Hsing Wu, Chi-Hung Liao, Li-Kong Turn | 2011-11-01 |