Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12360179 | System and method for measuring magnetic fields in PVD system | Wen-Hao Cheng, Yen-Yu Chen | 2025-07-15 |
| 12364173 | Resistive memory cell using an interfacial transition metal compound layer and method of forming the same | Wen-Hao Cheng, Yuan-Huang LEE, Yu-Wen Liao, Yen-Yu Chen | 2025-07-15 |
| 12341042 | Method for depositing target material in deposition chamber with tiltable workpiece holder | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2025-06-24 |
| 12331392 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2025-06-17 |
| 12233368 | Particle remover and method | Wen-Hao Cheng, Yen-Yu Chen | 2025-02-25 |
| 12176253 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2024-12-24 |
| 12104268 | Treatment system and method | Zong-Kun LIN, Chien-Hsun Pan, Yen-Yu Chen, Yi-Ming Dai | 2024-10-01 |
| 12089506 | Target for MRAM | Wen-Hao Cheng, Yen-Yu Chen | 2024-09-10 |
| 12030008 | Particle remover and method | Wen-Hao Cheng, Yen-Yu Chen | 2024-07-09 |
| 11965237 | System and method for detecting abnormality of thin-film deposition process | Wen-Hao Cheng, Yen-Yu Chen | 2024-04-23 |
| 11851751 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen | 2023-12-26 |
| 11742231 | Movable wafer holder for film deposition chamber having six degrees of freedom | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2023-08-29 |
| 11732379 | Treatment system and method | Zong-Kun LIN, Chien-Hsun Pan, Yen-Yu Chen, Yi-Ming Dai | 2023-08-22 |
| 11728226 | Deposition system and method | Wen-Hao Cheng, Yen-Yu Chen, Yi-Ming Dai | 2023-08-15 |
| 11688615 | System and method for heating semiconductor wafers | Wen-Hao Cheng, Yen-Yu Chen | 2023-06-27 |
| 11635400 | Gas sensor | Hsiao-Wen Zan, Hsin-Fei Meng, Chien-Lung Wang, Sheng-Fu Horng, Wei-Lun Chen +2 more | 2023-04-25 |
| 11396695 | Electromagnetic module for physical vapor deposition | Chien-Hsun Pan, Yen-Yu Chen, Chun-Chih Lin | 2022-07-26 |
| 10844477 | Electromagnetic module for physical vapor deposition | Chien-Hsun Pan, Yen-Yu Chen, Chun-Chih Lin | 2020-11-24 |