Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11387123 | Metrology method in wafer transportation | Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2022-07-12 |
| 10651066 | Metrology method in wafer transportation | Yao-Yuan SHANG, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2020-05-12 |