Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087602 | Wafer cleaning method | Kuo-Shu Tseng, You-Feng CHEN | 2024-09-10 |
| 11742227 | Wafer cleaning system and method | Kuo-Shu Tseng, You-Feng CHEN | 2023-08-29 |
| 11387123 | Metrology method in wafer transportation | Powen Huang, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2022-07-12 |
| 10651066 | Metrology method in wafer transportation | Powen Huang, Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2020-05-12 |
| 10515833 | Wafer cleaning system and method | Kuo-Shu Tseng, You-Feng CHEN | 2019-12-24 |
| 10345716 | Metrology method in reticle transportation | Kuo-Shu Tseng, Yen-Yu Chen, Chun-Chih Lin, Yi-Ming Dai | 2019-07-09 |
| 9919350 | Cup-wash device, semiconductor apparatus, and cup cleaning method | Kuo-Shu Tseng, Chih-Hsien Hung, Cheng-Yi Lin, You-Feng CHEN | 2018-03-20 |
| 9770092 | Brush, back surface treatment assembly and method for cleaning substrate | Kuo-Shu Tseng | 2017-09-26 |
| 9570334 | Method and system for positioning wafer in semiconductor manufacturing fabrication | Kuo-Shu Tseng, Chune-Te YANG, Chi-Hsin Chan, Chung-Jhieh Chen | 2017-02-14 |