Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087602 | Wafer cleaning method | Kuo-Shu Tseng, Yao-Yuan SHANG | 2024-09-10 |
| 11742227 | Wafer cleaning system and method | Kuo-Shu Tseng, Yao-Yuan SHANG | 2023-08-29 |
| 10515833 | Wafer cleaning system and method | Kuo-Shu Tseng, Yao-Yuan SHANG | 2019-12-24 |
| 10074547 | Photoresist nozzle device and photoresist supply system | Kuo-Shu Tseng, Yen-Yu Chen | 2018-09-11 |
| 9919350 | Cup-wash device, semiconductor apparatus, and cup cleaning method | Kuo-Shu Tseng, Chih-Hsien Hung, Cheng-Yi Lin, Yao-Yuan SHANG | 2018-03-20 |
| 9892982 | Method for controlling exhaust flow in wafer processing module | Kuo-Shu Tseng, Chien-Hua Chen, Yen-Yu Chen, Zhong Chen, Yung-Haw Liaw | 2018-02-13 |