Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230517 | Exhaust system and process equipment | Hsien-Chang Hsieh, Chun-Chih Lin, Tah-Te Shih, Wen-Hsong Wu, Yu-Jen Su | 2025-02-18 |
| 11348811 | Thermal chamber exhaust structure and method | Hsien-Chang Hsieh, Chun-Chih Lin, Tah-Te Shih, Wen-Hsong Wu, Yu-Jen Su | 2022-05-31 |
| 10366909 | Thermal chamber exhaust structure and method | Hsien-Chang Hsieh, Chun-Chih Lin, Tah-Te Shih, Wen-Hsong Wu, Yu-Jen Su | 2019-07-30 |
| 9570334 | Method and system for positioning wafer in semiconductor manufacturing fabrication | Yao-Yuan SHANG, Kuo-Shu Tseng, Chi-Hsin Chan, Chung-Jhieh Chen | 2017-02-14 |