Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940737 | Method of fabricating reticle | Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2024-03-26 |
| 11003091 | Method of fabricating reticle | Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2021-05-11 |
| 10534272 | Method of fabricating reticle | Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2020-01-14 |
| 10073354 | Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure tool | Yung-Cheng Chen, Fei-Gwo Tsai, Chi-Hung Liao, Shih-Chi Fu, Wei-Ti Hsu +4 more | 2018-09-11 |
| 9908201 | Systems and methods for edge bead removal | Chun-Hao Chang, Shang-Yun HUANG, Jui-Ping Chuang, Li-Kong Turn, Fei-Gwo Tsai | 2018-03-06 |
| 8683395 | Method and system for feed-forward advanced process control | Chih-Jen Yu, Chun-Hung Lin, Juin-Hung Lin, Li-Kong Turn, Keh-Wen Chang | 2014-03-25 |
| 8429569 | Method and system for feed-forward advanced process control | Chih-Jen Yu, Chun-Hung Lin, Juin-Hung Lin, Li-Kong Turn, Keh-Wen Chang | 2013-04-23 |