Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081365 | Treatment to interface between metal film and BARC or photoresist | Chung-Hao Chang, Chih-Jen Yu | 2021-08-03 |
| 8683395 | Method and system for feed-forward advanced process control | Chih-Jen Yu, Chun-Hung Lin, Juin-Hung Lin, Hsueh-Yi Chung, Li-Kong Turn | 2014-03-25 |
| 8429569 | Method and system for feed-forward advanced process control | Chih-Jen Yu, Chun-Hung Lin, Juin-Hung Lin, Hsueh-Yi Chung, Li-Kong Turn | 2013-04-23 |
| 7564556 | Method and apparatus for lens contamination control | Jun-Ren Chen | 2009-07-21 |