Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12199054 | Method and apparatus for improved wafer coating | Cheng-Feng Wu | 2025-01-14 |
| 11081365 | Treatment to interface between metal film and BARC or photoresist | Chung-Hao Chang, Keh-Wen Chang | 2021-08-03 |
| 8683395 | Method and system for feed-forward advanced process control | Chun-Hung Lin, Juin-Hung Lin, Hsueh-Yi Chung, Li-Kong Turn, Keh-Wen Chang | 2014-03-25 |
| 8429569 | Method and system for feed-forward advanced process control | Chun-Hung Lin, Juin-Hung Lin, Hsueh-Yi Chung, Li-Kong Turn, Keh-Wen Chang | 2013-04-23 |