Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176211 | Reflection mode photomask | Chih-Chiang Tu | 2024-12-24 |
| 12066757 | Mask and method of forming the same | Chih-Chiang Tu, Shih-Hao Yang, Jheng-Yuan Chen | 2024-08-20 |
| 11854861 | System and method for performing spin dry etching | Chih-Chiang Tu | 2023-12-26 |
| 11735421 | Reflection mode photomask and method of making | Chih-Chiang Tu | 2023-08-22 |
| 11662656 | Mask and method of forming the same | Chih-Chiang Tu, Shih-Hao Yang, Jheng-Yuan Chen | 2023-05-30 |
| 11531263 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2022-12-20 |
| 11270884 | Reflection mode photomask | Chih-Chiang Tu | 2022-03-08 |
| 11099476 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2021-08-24 |
| 11086211 | Masks and methods of forming the same | Shih-Hao Yang, Chih-Chiang Tu | 2021-08-10 |
| 10969682 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Ching-Yueh Chen | 2021-04-06 |
| 10852634 | Phase shifter mask | Chih-Chiang Tu, Shih-Hao Yang | 2020-12-01 |
| 10845698 | Mask, method of forming the same and method of manufacturing a semiconductor device using the same | Chih-Chiang Tu, Shih-Hao Yang, Jheng-Yuan Chen | 2020-11-24 |
| 10698313 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Ching-Yueh Chen | 2020-06-30 |
| 10678126 | Semiconductor mask blanks with a compatible stop layer | Chih-Chiang Tu, Boming Hsu, Tran-Hui Shen | 2020-06-09 |
| 10670956 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2020-06-02 |
| 10553428 | Reflection mode photomask and fabrication method therefore | Chih-Chiang Tu | 2020-02-04 |
| 10345692 | Photomask and a fabrication method therefor | Chih-Chiang Tu, Shih-Hao Yang | 2019-07-09 |
| 10276426 | System and method for performing spin dry etching | Chih-Chiang Tu | 2019-04-30 |
| 10156783 | Image mask film scheme and method | Chih-Chiang Tu, Jong-Yuh Chang, Boming Hsu, Tran-Hui Shen | 2018-12-18 |
| 10157805 | Moveable and adjustable gas injectors for an etching chamber | Tzung-Shiun Lu, Shih-Hao Yang, Jong-Yuh Chang | 2018-12-18 |
| 10095102 | Photomask having a plurality of shielding layers | Chih-Chiang Tu | 2018-10-09 |
| 10012899 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu, Chue-San Yoo, Jong-Yuh Chang, Chia-Shiung Tsai, Ping-Yin Liu +3 more | 2018-07-03 |
| 10007176 | Graphene pellicle for extreme ultraviolet lithography | Chih-Chiang Tu | 2018-06-26 |
| 9953833 | Semiconductor mask blanks with a compatible stop layer | Chih-Chiang Tu, Boming Hsu, Tran-Hui Shen | 2018-04-24 |
| 9921467 | Mask blank and mask and fabrication method thereof | Chih-Chiang Tu | 2018-03-20 |