Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11226551 | Lithographic mask, a pellicle therein and method of forming the same | Ching-Yueh Chen | 2022-01-18 |
| 10969682 | Apparatus and method for developing a photoresist coated substrate | Chun-Lang Chen, Ching-Yueh Chen | 2021-04-06 |
| 10802395 | Lithographic mask, a pellicle therein and method of forming the same | Ching-Yueh Chen | 2020-10-13 |
| 10698313 | Apparatus and method for developing a photoresist coated substrate | Chun-Lang Chen, Ching-Yueh Chen | 2020-06-30 |
| 9829786 | PSM blank for enhancing small size CD resolution | Chun-Lang Chen | 2017-11-28 |