Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12287581 | Method of manufacturing semiconductor devices using a photomask | Chung-Hao Chang, Ming-Wei Chen, Ai Ma | 2025-04-29 |
| 12124163 | Mask defect prevention | Chi-Ta Lu, Chih-Chiang Tu, Cheng-Ming Lin, Wei-Chung Hu, Ting-Chang Hsu +1 more | 2024-10-22 |
| 11860530 | Mask defect prevention | Chi-Ta Lu, Chih-Chiang Tu, Cheng-Ming Lin, Wei-Chung Hu, Ting-Chang Hsu +1 more | 2024-01-02 |
| 11402743 | Mask defect prevention | Chi-Ta Lu, Chih-Chiang Tu, Cheng-Ming Lin, Wei-Chung Hu, Ting-Chang Hsu +1 more | 2022-08-02 |
| 11226551 | Lithographic mask, a pellicle therein and method of forming the same | Tzung-Shiun Liu | 2022-01-18 |
| 10969682 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Chun-Lang Chen | 2021-04-06 |
| 10802395 | Lithographic mask, a pellicle therein and method of forming the same | Tzung-Shiun Liu | 2020-10-13 |
| 10788764 | Apparatus and a method of forming a particle shield | Wen-Hao Cheng, Chue-San Yoo | 2020-09-29 |
| 10698313 | Apparatus and method for developing a photoresist coated substrate | Tzung-Shiun Liu, Chun-Lang Chen | 2020-06-30 |
| 10168626 | Apparatus and a method of forming a particle shield | Chue-San Yoo, Wen-Hao Cheng | 2019-01-01 |
| 10126666 | Apparatus and a method of forming a particle shield | Chue-San Yoo, Wen-Hao Cheng | 2018-11-13 |
| 6924069 | Method for repairing attenuated phase shift masks | — | 2005-08-02 |
| 6838214 | Method of fabrication of rim-type phase shift mask | — | 2005-01-04 |